Hi Guys, I thought this might be interesting, especially with the interest in SiN filters. While playing around with the SiN membranes for my project over in ChemE, I fought that the 1 micron SiN is surprisingly strong and that I can place our silicone gaskets onto the membrane and remove it without damage. By placing the…
Based on previous data, we have seen a reduction in pore size and porosity when we increase the oxide thickness. For this experiment, we compare asymmetrical oxide thicknesses with symmetrical oxide thicknesses to observe which layer has the dominate effect on pore size and porosity. Wafer 718 is a 40/15/40, 719 is a 20/15/20 and…
This experiment is to determine if the time between the SC1 clean and when the wafers get deposited matter. Currently there is suspicion that an SC1 from an RCA clean should at RIT should be done right before deposition, . So what is done typically is that lithography steps are done weekly at RIT to…
The older sepcon macro has been update to fix previous issues and yield more meaningful results. These updates are being brought up to get feedback from the group and from there implement them and make these changes to the newer sepcon patterns and eventually the TEM patterns. Gathering and analyzing statistical data is standard practice…