Update: 30/100/30 OSO, 30/75/30 & 30/100/30 NSN SEPCON
We are trying to reproduce the very small pores Joe created with 30/100/30 OSO and large pores created with 30/100/30 NSN using a SEPCON pattern. (Joe’s previous post.) We had a problem with several chips releasing from the center of the wafer prior to completely clearing all the features. In the future we will use…