pnc-Si removal from SiN-NP chips

JP and Josh Miller used the Xactic Si etcher to remove the pnc-Si from SiN-NP samples.  I believe they ran cycles until the samples looked visibly like SiN only.  Below are some SEM cross-sections showing before and after images of the samples.

Sample 1028 with no RIE etch:

control x-section
control x-section of wafer 1028 with no RIE

1028X 2

 

Sample 1036 with 20 s RIE etch:

20 s RIE
20 s RIE

1036X 2

Sample 1029 with 30 s RIE etch:

30 s RIE
30 s RIE

1029X 7

 

It looks like the pnc-Si has been removed from most of these samples.  Perhaps 1029 could have used more time.

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