pnc-Si removal from SiN-NP chips
JP and Josh Miller used the Xactic Si etcher to remove the pnc-Si from SiN-NP samples. I believe they ran cycles until the samples looked visibly like SiN only. Below are some SEM cross-sections showing before and after images of the samples.
Sample 1028 with no RIE etch:

Sample 1036 with 20 s RIE etch:

Sample 1029 with 30 s RIE etch:

It looks like the pnc-Si has been removed from most of these samples. Perhaps 1029 could have used more time.


