E-beam Deposition of Ag, Cold ALD Runs, and Sepcon Assembly For Making a Nanofluidic Transistor
Last week I conducted a variety of experiments to try to make a nanofluidic transistor (a device described in detail in this previous journal club post). I did some light optimization of the E-beam deposition of Ag films over a 3nm Ti adhesion layer in the PVD lesker machine and found that 12nm of Ag gives…