Dave delivered W637, a wafer made using the sample recipe as W504, to us today. This wafer has a high occurrence of single pinholes, with only 12 samples pinhole-free. I also noticed some odd features on the membranes, shown below. In the reflection images above, some sort of substance is on the membrane. In the…
W613, the wafer with 30 nm thick pnc-Si that is oddly etched to form “H” shaped membranes, was tested for burst pressure and attempted to measure air permeability. When doing air permeability all samples broke, meaning are very weak. This was demonstrated in the burst pressure values, shown below. I guess the large, oddly shaped…
The production crew recently delivered W620 to the lab, which was created to mimic W504 (and W612). W620 shows high burst pressure and has air permeability comparable to W504/612.
I tested W612 for air permeability and burst pressure, shown below. It should be noted that the air permeability and burst pressure values are comparable to W504; looks like a good reproduction! I also tested a sample with the hexane residue and debris, no difference in permeability or burst pressure was seen. Background pores included…
I am in the process of inspecting each membrane in the newly created wafer 612. First of all, some samples (~10% counted so far) have tears on the membrane edges, shown below. Images were taken at 20x microscope magnification (reflection image followed by transmission). I also have been seeing circular defects which do not penetrate…
Here are two new designs for the new diffusion cells. Design_2 could be a better solution as it separates the two connections and uses screws to make the wire contacts to outside circuit. Please feed back any ideas to improve these designs. Dave and I probably will start working on it some time this week….