Air Permeability (w 318, 319, 320, 307) and Updated Burst Pressures
There is some non-uniformity in air permeability based on the position but it is not very clear for wafers 318 and 319. The full wafer measurement in future will make this dependence more obvious.
Permeability of w319 is much higher then of w318 (RTP 1000C and 900C) as expected from TEM images where w319 has higher porosity.
I added new data (w303, 307,311, 313,316,318,319) to burst pressures book Membrane_Burst_Book.xls



