Wafer 1059: Burst Pressure Analysis
The following data is from analysis of Wafer #1059, consisting of 30nm pnc-Si with 7% porosity and an average pore diameter of 28nm. Square window sizes with sides lengths of 0.1mm, 0.3mm, 0.5mm, 0.7mm, and 0.9mm were tested. For 1.1mm x 1.1mm windows, burst pressures could not be determined, as these windows did not etch all the way.
Below, a map and key of defects on this wafer are shown. In general, chips with pinholes had lower burst pressures than those without pinholes.
The following map shows burst pressure ranges for chips with no apparent defects. Within a certain window size, darker colors correspond to weaker burst pressures, and brighter colors correspond to higher burst pressures.
Overall, when analyzing data from the good chips, higher burst pressures corresponded to smaller window areas.
