Burst Pressure: pnc-Si vs. NPN
This past year I have been collecting burst pressure data on pnc-Si and NPN. The data for 30nm pnc-Si came from my previous post, “Wafer 1059: Burst Pressure Analysis”, which also includes a wafer map. This wafer had 7% porosity and an average pore diameter of 20nm. I tested square window sizes with side lengths of 0.1mm,…