AJA qualification visit
Chris and I visited the AJA sputter company in Boston last week. The tool was fully functional and we were able to deposit several test wafers. Overall, we were impressed with the performance. The uniformity across a 6″ substrate was sub-1 %. This is certainly a huge improvement over the 3-5% uniformity we currently achieve over a 4″ substrate with our current tool. We did have some suggestions for AJA before they deliver the tool, but we still anticipate it to be in Hopeman by the second week of July. Once it is delivered, we will need a week to hook the sputterer up to utilities. A technician will then come to turn the tool on and verify that everything runs smoothly.
The complete unit. Chamber on the left, control tower on the right.
Four sputter guns. Three RF sources, one DC.
Turbo pump and VAT valve pressure regulation unit
Two SiO2 targets, one Si, one Er
SiO2 deposition