Hello everyone! I’d like to show you some recent result about pnc-Ge membrane. We have been thinking to replace Si with Ge for a long time to see whether we can transfer pore formation to another materials other than silicon. In this post, I’m gonna show you some exciting pnc-Ge membrane images! The fabrication process…
Here are some other in-situ heating videos I made recently. First one is NSN30730, which means the Si is 7nm and Si3N4 is 30nm. The speed of the video is 10 time faster than the real time. The first figure is the heating illustration and then comes with the video. The next is sample NSN301030….
Here is an interesting discovery of nanopores in the SiO2 layer after the laser annealing. Basically I was doing laser annealing on free-standing OS membrane the other day. It’s an excimer laser with 248nm wavelength, 25ns FWHM and spot size of 2.6 mm diameter. Same setup we used before in ORNL. The sample we test…
I have been working on the in-situ heating experiments on the free-standing membranes in the past few weeks. After quit a few times attempts I finally have some good videos made from the TEM images that were taken during the in-situ heating process. First I’ll introduce the background of these two videos including sample info,…
Hello everyone! The new FEI Osiris TEM system has been finally setup recently. With the new purchased Gatan single tilt heating holder 628, we were managed to do an in-situ heating experiment with the Osiris system last week. We used the same sample OSO201510, which was used in Harvard, to test this heating holder as…
Hello everyone! I plan to write several posts in the next couple of weeks about the laser annealing of our sputtered three-layer stack. This laser annealing experiment is done at Center for Nanophase Materials Sciences (CNMS) at Oak Ridge National Laboratory (ORNL). It is a collaborational proposal we submitted at the end of last year…
Hello everyone! After a long time waiting and setting up, the new AJA and RTP at Vanderbilt University now are ready to go! Here are a couple of pictures of the new AJA and RTP. I have been working on testing the new AJA for a while with my old recipes. The new AJA system…
In order to verify the validity of the result of the five-layer structure I did last time, I deposited another wafer with NOSON stack, which has the identical thickness as that of the last time. The annealing condition is also same as the last time, which is 1 minute holding time at 1000C with a…
During my visit last, I deposited a couple of wafers and one of them is to test a even thicker Si film from the NSN stack. The thickness for the Si film is 200nm and the nitride layers are still 30nm. After deposition, the Si wafer was etched and the pop-out TEM grids were then…
In the previous posts, I have shown that nanopores can be formed in silicon film sandwiched by two silicon nitride films. This discovery shows silicon nitride as an alternative barrier layer in the stack geometry. In this post, I’ll discuss a hypothesis about the pore forming conditions. The hypothesis is that either silicon dioxide or…