Prior Post w/original data and images UPDATE: In the couple plots below, the minimum dimension has been changed to aspect ratio (minimum dimension/maximum dimension): For constant perimeter: alpha=1.1930, beta=.2005, gamma= -0.1380 And for constant area: alpha= -0.1624, beta= -0.0060, gamma=0.2922 In my last post I explained an experiment where multiple features were put on a single sample…
Josh and I are taking a closer look at how the samples burst and what different factors can affect the strength of the membrane. We are specifically looking at minimum dimension, area, and perimeter. A wafer was designed that contained different sized samples. One of the three factors were held constant while the other two…
In my last post we determined that there is an inverse relationship between porosity and burst pressure. I continued to dig further into other factors that affect the burst pressure of the membrane. Pure silicon was used in all the measurements. I measured the burst pressure of many samples that differed in properties that includes…
Permeance of a sample was first calculated by taking a TEM image of the membrane and extracting pore size histograms. The flow rate through each pore can be calculated and then summed to determine the flow rate through the sample. The flow rate is then normalized by the pressure and surface area to calculate permeance…