Ar sputt. 15 nm temperature series
Recently, I have been exploring the temperature dependence of post-Si deposition Ar sputtered films (15 nm thick). Below is a comparison of the average pore size, porosity, and density of pores of Ar and non-Ar sputtered films annealed between 800 C and 1100 C. It appears that Ar sputtering increases the avg. diameter and porosity…