Sensor presentation
I attached a presentation here for tomorrow’s meeting.
I attached a presentation here for tomorrow’s meeting.
Initial studies into the mechanical properties of pnc-Si were carried out using the “bulge test”. With JP’s help, we’ve collected a large amount of pressure-displacement measurements. This technique has been used to investigate thin film membranes suspended over windows of different geometries e.g. Vlassak. In this study, we measure the deflection of a pressurized membrane…
I took a closer look at some of Lingyun’s samples today, and captured some interesting TEM images. wafer 205 with 10 nm Ti @ 35kx wafer 205 with 10nm Ti @ 250kx wafer 205 with 10nm Ti & 10nm Au @ 35kx wafer 205 with 10nm Ti & 10nm Au @ 200kx The higher mag….
Last week we attempted to mimic our standard CVC recipe in the AJA system (15 nm Si, 450 C deposition temp, 1000 C RTP). I should note that the protective oxide thickness in the AJA membrane was 20 nm (not 40 nm as it was in the CVC). Below are two images comparing the AJA…
Upper and lower gaskets used to make a counter flow device. The danger is that the enclosing pdms can easily flex into the membranes on the flat side of the chip. A hard plastic cover can be used to prevent accidental contact between the PDMS and membrane.
A few weeks ago Dave dropped of a humidity monitor for the third floor equipment room. Since then I have been recording the humidity every time I run a UV Ozone process for PDMS-glass or PDMS-pncSi bonding and there seems to be a correlation between the two. Over the last week there seems to be…