Ultrathin ~10nm npMgF2 TEM structure

ByGreg Madejski

I am attempting to manufacture a range of npMgF2 thicknesses as demonstrated in my recent CCD post. Yesterday, I undershot my thicknesses substantially, I believe because of construction vibrations in the building. However, this results in some of the thinnest npMgF2 structure I have ever been able to image. I was targeting 15 nm, but only deposited about 10 nm @ 250C as best I can tell from the profilometer.

64kx of 1236 15nm npMgF2. The bulk region is on the left, freestanding region is on the right. Instead of many MgF2 grains lumped on top of each other, we have a much more even layering.

 

Pore outlines used for Pore Histogram (8900x according to TEM).
Pore Histogram of 1236 15nm MgF2. Infilling is still observable even at thin thicknesses compared to 1236 average pore diameter of ~55-60nm.

 

Unfortunately I wasn’t able to get a tilt stack, either because of vibration in the building or the membrane warping under the stress of the beam. Will try again in the near future.

 

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