Oxygen RTP better than Argon RTP
In continuation of the previous post, its been further observed that O2 RTP treated samples remain unchanged whereas the Ar RTP treated samples started to discolor after a week, as shown in the following images:
In order (left to right)
1. Ozone+Ar RTP
2. Ozone+O2 RTP
3. Control (Untreated)
4. Ar RTP
5. O2 RTP
Excellent – an expected difference!! So how long do they need to be stable for? We are going to be balancing a variety of factors now, so we need to determine what our targeted stability time is. Were the unstripped membranes stable for over a week? If so, how long?
Were the O2 RTP membranes a little wrinkled after the treatment? How long was the treatment – probably a few minutes? I have a feeling that they probably have a lower burst pressure if they have wrinkled up. Still, we can dial back the heat or O2 flow so they don’t wrinkle, but this will probably reduce their ultimate stability. We may also want to try the nitrogen treatment, although I’m not sure cells will still stick to them at that point. We should also try annealing before stripping the mask oxide.
Lots to discuss!!