From the last post, I had successfully manufactured waveguide on top of our porous silicon nanomembrane chip. However, the proof that light can transmit through the waveguide was not accomplished until last week. The problems I was experiencing included insufficient thickness and wrong cladding layer refractive index. Thus, in order to prove that my waveguide…
Abstract: In this project, we want to explore the possibility of detecting molecules in nanopores by building waveguides upon a silicon nanomembrane chip. The first experiment is performed by sending 650nm laser light onto our waveguides and detecting the light waveguided by our patterned structure. This is used to prove that light can overcome the…
There are four main challenges for making such a thin photoresist gasket on a little chip. Q1: How can I get under 1um thickness photoresist gasket? Q2: Is the adhesion of photoresist gasket strong enough for further usage? Q3: How can I write the pattern onto the gasket that will have the center window open?…
This is my (Jim) summary of the results thus far for NPN vs NPN-O and Front Side/Back side comparisons. More to come … ************************************************************************************************************* As thesis indicated, the thicker membrane is, the larger average pore size will be. From my process, the average pore size for 50nm membrane is between 9nm and 10nm; the…