Introduction & Background Parylene is a polymer stemming from the chemical-vapor-deposited poly(p-xylylene) group. This polymer treatment is applied as a gas which allows complete and uniform coatings of substrates with even nanoscale features. Parylene treatment is widely used as it offers a chemically and biologically inert layer with excellent electrical properties, and additionally acts as…
Simpore produced a wafer of 50 nm NPN with a matrix of (4) widths X (5) lengths Widths of 100 um, 300 um, 500 um, and 700 um Lengths of 1 mm, 1.5 mm, 2 mm, 2.5 mm and 3 mm Each chip has one membrane. These are the dimensions of the membranes. Using the burst…
We created a 25-40-25 OSO stack with a SEPCON pattern. RTP at 1050 C 100 C/s 60 s. The following images show a comparison between the STEM detector and the SEM detector, and then a couple more images at 100 kx and 50 kx. I calculated a porosity of ~6.5 %, and…
Prior Post w/original data and images UPDATE: In the couple plots below, the minimum dimension has been changed to aspect ratio (minimum dimension/maximum dimension): For constant perimeter: alpha=1.1930, beta=.2005, gamma= -0.1380 And for constant area: alpha= -0.1624, beta= -0.0060, gamma=0.2922 In my last post I explained an experiment where multiple features were put on a single sample…
Karl, Charles and I measured the burst pressure and permeance of some 30-50-30 and 30-100-30 NSN. Burst Pressure: The SEPCONs readily burst at pressures under 1 psi when the flow was directed from the backside of the chip through the membrane. The membranes were able to withstand higher pressures when the pressure was applied from…
I recently received three pinhole-ridden wafers for cell-related experiments. All three have been RTPed at 800C for 5 minutes in argon, which is the typical procedure we have been using for cell culture. The bursts pressures for each wafer are shown below. W520 is weaker than 558 and 559; I plan on using the stronger…
W509X, with single 100um by 1000um slits, was tested for air permeability and burst pressure. Prior to testing, I inspected all membranes for pinholes.; every sample had pinholes on the membrane perimeter, as shown below. The first two images are in reflection mode (pinholes appear black) and the last is a transmission image (pinholes appear…
Transferred from other blog… Wafers 398 and 418 were recently tested for burst pressure. Wafer 398 had a burst pressure range of 4.28-8.24 psi, with the great majority of intact membranes on the wafer having no or one tiny pinhole. When removing samples from this wafer more shards than usual were created, with some fragments…