We received W648 from the production team this week. Upon inspection of this wafer, is has a higher density of pinholes than we have been seeing lately (>3 pinholes/slit compared to 0 or 1/slit) and seems to show a return of contamination, shown below. This contamination is visible over the entire wafer, but is easiest…
W613, the wafer with 30 nm thick pnc-Si that is oddly etched to form “H” shaped membranes, was tested for burst pressure and attempted to measure air permeability. When doing air permeability all samples broke, meaning are very weak. This was demonstrated in the burst pressure values, shown below. I guess the large, oddly shaped…
The production crew recently delivered W620 to the lab, which was created to mimic W504 (and W612). W620 shows high burst pressure and has air permeability comparable to W504/612.
I tested W612 for air permeability and burst pressure, shown below. It should be noted that the air permeability and burst pressure values are comparable to W504; looks like a good reproduction! I also tested a sample with the hexane residue and debris, no difference in permeability or burst pressure was seen. Background pores included…
I recently tested W510X and W600 described by Dave here for air permeability, rhodamine diffusion, and burst pressure. No air permeability was observed; even a sample with one very small pinhole (W600 800C anneal) only had a permeability of 11 cc/atm*cm2*s. To verify the lack of pores I performed rhodamine diffusion on the W600 700C…
W509X, with single 100um by 1000um slits, was tested for air permeability and burst pressure. Prior to testing, I inspected all membranes for pinholes.; every sample had pinholes on the membrane perimeter, as shown below. The first two images are in reflection mode (pinholes appear black) and the last is a transmission image (pinholes appear…