Pore morphology is RTP time dependent
During the last production run, we experimented with varying the RTP annealing time (1 min vs. 5 min) at three different RTP temperatures (1050 C, 1100 C, 1150 C) in a 30 nm thick membrane. Below are the TEM micrographs with corresponding histograms and average pore diameter/porosity plot. Of note is the 1050 C anneal…