Nanopocket Membrane Fabrication-Update

ByShayan Gholizadeh
Figure 1. Nanopocket membrane fabrication process
Figure 2. Nanopocket membranes fabricated through 1 um positive amidine bead coating on a 2″ silicon wafer, followed by parylene deposition and etching, and bead removal. Pores have large micron-sized opening of 1 um and small nano-sized opening of 250 nm on average, imaged through the nanopore side. Scale bar=1 um

 

Figure 3. Current challenges. A) Appearance of cracks in close-packed membranes. B) Non-uniform coating of beads leading to non-uniform results after RIE etching. C) Bead aggregation leading to bald spots. D) Better uniformity in Parylene coating after increasing the thickness from 4 um to 8 um, but still appears more coating.

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