W567 Burst Pressure and Air Permeability

I recently received wafer 567 from Dave for cell culture work. It has many intact membranes but is riddled with pinholes, having only 3 pinhole-free samples. I decided to test them for air permeability and burst pressure, shown below.

I also noticed some odd features on the membrane and surrounding Si. They are circular but do not seem to be completely through the membrane like pinholes. I circled the feature in the images below.

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2 Comments

  1. Karl,

    The feature you circled looks like a contaminant, probably from the Pentane dip.

  2. Thanks Dave. I forgot to mention this is a single slit wafer with 100um x 1000um slits.

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