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8 hour diffusion
Because of the recent discoloration problems I observed with 24 hour diffusion using w670 and 673, I decided to try a shorter time point. 673 had a couple more samples to spare, so I tried an 8 hour diffusion experiment. No discoloration was observed: This is the normal color of the wafer. Slits were not…
Burst Pressure Tests: Rectangular Windows
Simpore produced a wafer of 50 nm NPN with a matrix of (4) widths X (5) lengths Widths of 100 um, 300 um, 500 um, and 700 um Lengths of 1 mm, 1.5 mm, 2 mm, 2.5 mm and 3 mm Each chip has one membrane. These are the dimensions of the membranes. Using the burst…
Wafers 510, 511 & 513
Last week I etched three wafers of different silicon thicknesses (10 nm, 15 nm, 20 nm). All the wafers had a TEOS mask with the standard three layer sputtered film on the front. Not that surprising is the fact that the thinnest membrane showed pores while the 15 and 20 nm membranes did not at…
NSN stacks with different Si thicknesses
ByJoe QiIn this post, I sum up all the NSN stacks with different Si thicknesses I have made so far. The nitride layer is 30nm thick for both the top and the bottom. The thickness for silicon film ranges from 7nm to 10nm, 15nm, 25nm, 50nm and 100nm. All the wafers were firstly etched and then…
Analysis of Burst Pressure of HD Membranes
Introduction PncSi membranes are used in the development of wearable hemodialysis (HD) device that provides with high toxin clearance rate for end-stage renal disease patients. Chips with 11 channels and a flow rate at 45 uL/min per channel were used in rat HD tests; these membranes, however, broke were not strong enough to sustain long…
100K Microcon Hydraulic Permeability
ByMike HI ran the same 100K microcon system through numerous pressure ranges and put together the spread of hydraulic permeability results.These results show that the hydraulic permeability of the microcon membranes decrease with increasing pressure. Once I finished running the tests at these pressures I reran a test at 19.52psi (3800RPM) to see if we would…