MgF2 + Si3N4 Nanomembrane Images

ByGreg Madejski

Here are some images of deposited magnesium fluoride films on 50 nanonitride:

 

Cracks in the deposited membrane form, even after only 45 seconds of etch (140C dep temp, sample 4, 70nm MgF2). High Temperature depositions don't have these cracks.
Cracks in the deposited membrane form, even after only 45 seconds of etch (140C dep temp, sample 4, 70nm MgF2). High Temperature depositions don’t have these cracks.

 

 

 

Scumming around edges post deposition? Sample 8, 250C, 100nm MgF2
Scumming around edges post deposition? Sample 8, 250C, 100nm MgF2
Cytovu after 120 seconds of etch
Cytovu after 120 seconds of etch
Hole in cytovu post 120s etch. Sample has been deposited with 200nm of MgF2 @ 140C.
Hole in cytovu post 120s etch. Sample has been deposited with 200nm of MgF2 @ 140C.
Example delamination. Large areas of MgF2 are curled up, suggesting that it can form a stable film, if thermal/mechanical stresses can be ameliorated.
Example delamination. Large areas of MgF2 are curled up, suggesting that it can form a stable film, if thermal/mechanical stresses can be ameliorated.
Curled Cytovu membrane post 200nm MgF2 deposition. The 'scumming' in the lower left corner is probably the MgF2
Curled Cytovu membrane post 200nm MgF2 deposition. The ‘scumming’ in the lower left corner is probably the MgF2

200nm mgf2 on cytovu 4

Crossection of Micropore with 200nm? MgF2 film.
Crossection of Micropore with 200nm? MgF2 film.
Crossection of 70nm 140C MgF2 film on bulk silicon. Pores are infilled. Debris corresponds roughly to holes in the film; I believe they are MgF2 plugs. Large particle is about the thickness of a conventional polycarbonate membrane.
Crossection of 70nm 140C MgF2 film on bulk silicon. Pores are infilled. Debris corresponds roughly to holes in the film; I believe they are MgF2 plugs. Large particle is about the thickness of a conventional polycarbonate membrane.

4 - 70nm mgf2 crossection1

Backside of freestanding region of 70nm MgF2 film on 50nm Si3N4, showing pores that are intact. The deposited film is most likely occluding all of the pores in this setup.
Backside of freestanding region of 70nm MgF2 film on 50nm Si3N4, showing pores that are intact. The deposited film is most likely occluding all of the pores in this setup.
Frontside MgF2 surface on Nanonitride Substrate, 350C, 75nm
Frontside MgF2 surface on Nanonitride Substrate, 350C, 75nm
Frontside MgF2 surface on Nanonitride Substrate, 350C 75nm
Frontside MgF2 surface on Nanonitride Substrate, 350C 75nm
Through pores present with 75nm MgF2 deposition?
Through pores present with 75nm MgF2 deposition?

 

MgF2 curls up in an interesting way...
MgF2 curls up in an interesting way…

 

 

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