Electrical Characterization of AJA Sputtered Oxide (Initial Experiment)
The electrical properties of 20nm and 50nm thick sputtered oxide is currently being investigated. Capacitance-Voltage (C-V) and Current-Voltage (I-V) tests are achieved by fabricating 200um-4kum diameter capacitor “dots” using Lesker SiO2 targets and flash-evaporated aluminum (CVC). A GCA stepper is also used during photolithography for 5X image reduction. The purpose of the experiment is two-fold:…