Burst Pressures: Wafers 510, 511, 513
I recently tested the burst pressures of samples from W510, 511, and 513. None of the membranes are pinhole free. Silicon thickness varies (15 nm, 10 nm, 20 nm). See Dave’s post for complete fabrication information. W513 has noticeably higher burst pressures compared to W510 and 511. Overall W510 is in the worse shape overall,…