SiO2 coated membranes
The SiO2 coated samples (from W335 & W341) were found completely discolored after 5 days in DMEM (benchtop). Thus, silicon dioxide coating didn’t prevent discoloration as much as the RTP treatment. There’s a need to check the discoloration profile of the SiO2 coated samples within 5 days. Till 24 hrs. there was no discoloration observed. Also there is a need to check the stability of treated membranes in the incubator which has a higher temperature than benchtop.
This is interesting, but not surprising. These films probably need to be annealed in the RTP to stabilize them, so if the RTP only process works better, we should discuss how to best proceed at the meeting tomorrow…
I agree.
(1)RTP in O2 has best performance because this process densifies a relatively thick oxide layer.
(2)SiO2 coated (e-beam) samples have a thick oxide coverage but not densified. Thus the stability is not long lasting.
(3)RTP in Ar will densify the native oxide on silicon, so it provides an effect between RTP in O2 and SiO2 coating.
(4)UV/ozone alone only creates a very thin oxide (maybe just as thin as native oxide), thus it does not help at all.
Taking into consideration of process cycle time and cost, it looks RTP in O2 should be catered.
Again, was the DMEM with, or without serum?
Here again DMEM is with 10% FBS. I have never used DMEM w/o FBS for discoloration studies before.