Today I looked at a wafer (391) that had been annealed in the RTP on top of a 6″ wafer substrate. The idea is that the six inch substrate would create a “shadow” around the 4″ wafer which would improve thermal uniformity by blocking the multiple reflections from the lamps inside the chamber. Here is…
We’ve got pores! Unfortunately, we are still being plagued by an unknown contamination that seems to be “eating” away at our membranes. This would explain why we’ve been having a hard time separating. We also observe a strong radial dependence in porosity AND size with these RT deposited films. In the past it was limited…
Our two O2 regulators arrived this week (it figures we would have two to arrive within a day of each other after waiting for weeks to have one). Tom and Lingyun got to work right away. The image below shows that the UV/Ozone system does reduce the contact angle dramatically when used with oxygen (recall…
Coming to a basement near you by the end of 2008 (assuming no delays that is). Pretty exciting in my opinion.
Samples are from wafers #316 and 318. This is the first time for wafer scale deposition. Processing conditions:1) chamber base pressure @ 6×10-7 Torr (previously @ 5×10-6 Torr)2) 15nm Ti + 15nm Au, no vacuum break Estimated “cell resistance”: about 20-25 ohm, much lower than previous measurement. Possible reasons why lower resistance is observed:1) “Au…
I few weeks ago I posted some flow rate data based on the 100K microcons in which three of the four membranes worked fine and the other appeared to be a “dud”. I pulled the four systems apart and used the digital calipers to measure the membrane thicknesses and found the following. – The three…
The new smaller EQ setup that Tom came up with were tested in these experiments. The benefit is that there is much less dilution of our filtrates. 500ul of our sample (in these cases we tested 1.0 mg/mL and 0.5 mg/mL brain extract) is loaded into the SepCon and 250uL of buffer fills the reservoir…
First Try is detailed in this post. Three membranes from w334 were used to separate depleted serum. As before we see that all of the proteins pass through the membrane, and again we can observe the one middle band that seems to appear more in the filtrate (red arrow). It’s possible that most of these…
click here for the powerpoint presentation click here for the PDF presentation
This gel shows the separation using two 100k Microcon membranes and 1mg/mL brain extract. 500uL of 1mg/mL brain extract was loaded into the Microcon and spun at 14000g for 5min. 400uL passed through the membrane (100ul remained on top). It appears that their “cutoff” as we would consider it is much lower, more like 50kD….