Anodic Bonding Vincent’s Chip Stack
Previous posts: Anodic Bonding Theory, Anodic Bonding Setup I had originally hoped there would be enough residual impurity in the oxide layer to create a direct bond with Vincent’s chips. This was a foolish hope. Pyrex is at least 4-5% doping and standard p-doped silicon wafers are 5-6 orders of magnitude less than that, with…