Parylene Nanopockets using Nanosphere Lithography
This initial aim of this project was to obtain “pockets” with sub-100nm pores, while the top opening is much larger. Dr. Carter is the mastermind behind this project. The following simple fabrication process diagram explains the current approach.
After initial failed experiments for obtaining very small openings, Marcela and I aimed for larger bead sizes (1 um).
After some initial success with 1um beads, we again turned to small pockets (300 nm). After some initial attempts, this is how far we have got:
