Nano-porous Lift-off Mini-update

New Lift-off setup, thanks to suggestions and concerns about flatness of the membrane after lift-off.

 

Floating SU8 – SiN membrane with superstructure submerged.

Membrane after removal from water

Membrane, dry on first version of lift-off super structure.

Membrane after separation. SiN has adhered to the superstructure and the SU8 peeled off the top. The circular openings retained the SiN.

Membrane after separation. Better image of the SiN circles remaining on the SU8.

Membrane on second superstructure. Directly after lift-off (no tampering or application if beads).

Membrane with 200nm florescent beads deposited on surface. Blue squares indicate regions of fully intact membranes. These beads are apparently very old, therefore smaller particles of florescence may have permeated the membrane in the other regions. In other words, the membrane may just have pores big enough for florescence debris to pass, not necessarily 200nm beads.

 

Update on lift-off experiment:

The oxides are all set thanks to Charles, Josh, and JP.

These wafers should be en route to Rogue Valley for 50 nm Nitride shortly.

The masks have finally shipped from the UK, hopefully these will not be held up in customs…

The masks are here! Everything looks good this time, I will have a variety of form factors for the SU-8 structure. They are all variations of 4 sided windows however, as I had to ditch the hexagons to meet the conversion requirements on the manufacturer’s end.