XPS data on oxidized and surface treated NPN
Katia Lyubarskaya in Alex Shestopalov’s lab has been testing different surface conditions of oxidised NPN membranes. I’ve placed her data below. (We used chips from wafer 1070) We started by looking at chips that received different chemical/plasma/thermal processes to create an oxide layer. The thermally treated sample has a significantly higher Oxygen peak, but…