In-situ TEM observation of pores movement from Harvard
A few weeks ago, professor Mike Aziz in Harvard University helped to annealed two samples and in-situ imaged the early stage of pore formation using their Jeol2010-hot-stage-TEM. The oxide seemed intact during the process. The sample was unannealed 20(bottom)/15(a-si)/10(top) three stack with removing the substrate. The first sample was heating to 693C. They took one…