Furnace annealing of free-standing NSN and OSO stacks (1)
I have done some furnace annealing (FA) on free-standing NSN and OSO stacks in last two weeks after the RTP was down. I’ll show the results in the following two posts. In order to compare the annealing result, I chose both NSN and OSO stacks with the same structure of 30-25-30, which corresponding to 25nm…