Pore Density vs. Pore Radius Graphs, 15nm width and 1000RTP

The purpose of this post is to see if there is a pattern in the Pore Density vs. Pore Radius graphs at certain manufacturing conditions. The following wafers all have widths of 15nm and RTPs of 1000. The porosities range from 6.48% to 8.33%.

**** note: the y-axis label should actually read “pore density (#/nm2)” ****

SC 023:

Average Pore Size: 16.0 nm

Porosity: 8.06%

Cut-Off Pore Size: 44.98 nm

Mean Roundness: 0.70, standard deviation: 0.15

Thickness: 15 nm

RTP: 1000

Ramp Rate: 10 C/s

SC 025:

Average Pore Size: 18.7 nm

Porosity: 7.37%

Cut-Off Pore Size: 47.70 nm

Mean Roundness: 0.74, standard deviation: 0.15

Thickness: 15 nm

RTP: 1000

Ramp Rate: 10 C/s

SC 066:

Average Pore Size: 21.8 nm

Porosity: 7.06%

Cut-Off Pore Size: 32.89 nm

Mean Roundness: 0.82, standard deviation: 0.11

Thickness: 15 nm

RTP: 1000

Ramp Rate: 100 C/s

SC 077:

Average Pore Size: 16.6 nm

Porosity: 7.37%

Cut-Off Pore Size: 32.67 nm

Mean Roundness: 0.79, standard deviation: 0.13

Thickness: 15 nm

RTP: 1000

Ramp Rate: 100 C/s

SC 078:

Average Pore Size: 15.5 nm

Porosity: 6.48%

Cut-Off Pore Size: 27.67 nm

Mean Roundness: 0.79, standard deviation: 0.15

Thickness: 15 nm

RTP: 1000

Ramp Rate: 100 C/s

SC 130:

Average Pore Size: 17.5 nm

Porosity: 8.04%

Cut-Off Pore Size: 30.05 nm

Mean Roundness: 0.83, standard deviation: 0.11

Thickness: 15 nm

RTP: 1000

Ramp Rate: 100 C/s

SC 131:

Average Pore Size: 18.5 nm

Porosity: 8.33%

Cut-Off Pore Size: 31.44 nm

Mean Roundness: 0.82, standard deviation: 0.11

Thickness: 15 nm

RTP: 1000

Ramp Rate: 100 C/s

SC 132:

Average Pore Size: 17.8 nm

Porosity: 7.12%

Cut-Off Pore Size: 31.96 nm

Mean Roundness: 0.82, standard deviation: 0.11

Thickness: 15 nm

RTP: 1000

Ramp Rate: 100 C/s

SC 141:

Average Pore Size: 17.1 nm

Porosity: 7.90%

Cut-Off Pore Size: 36.99 nm

Mean Roundness: 0.82, standard deviation: 0.12

Thickness: 15 nm

RTP: 1000

Ramp Rate: 100 C/s

SC 225:

Average Pore Size: 14.9 nm

Porosity: 6.86%

Cut-Off Pore Size: 33.29 nm

Mean Roundness: 0.77, standard deviation: 0.14

Thickness: 15 nm

RTP: 1000

Ramp Rate: 100 C/s

Conclusions:

Interestingly, the wafers with ramp rates of 100 C/s show clear peaks at a pore radius of 10nm while the wafers with ramp rates of 10 C/s do not exhibit clear peaks.