Membrane wrinkles
For the last two weeks, we have observed that membranes have been wrinkling post-oxide strip. After some investigation, it was determined that the cause of wrinkling was from a cracked SiO2 target in the sputter system.
I also saw a suppression of pore formation in the wrinkled films as compared to an unwrinkled membrane.
The cracked target has now been removed, but expect membranes SC 195 – SC 220 be wrinkled. Mechanical strength seems to be unaffected by the wrinkling, though.