SU-8 Shrinkage
Goal: Measure SU-8 shrinkage that have gone through various soft and hard bake conditions To measure the shrinkage, the SU-8 scaffolds needed to be lifted off, but there was some issues. Originally, the SU-8 was spincoated onto an oxide layer, which would be etched away using BOE. The SU-8 had appeared to be disintegrating due…