SiN NP wafer #'s 1029 and 1030 pore size revisions
Our work with permeance and hydraulic permeability tests on the SiN-NP seemed to show that the porosity and pore sizes I had calculated from the STEM images were too high. I used URnano’s TEM to get better quality images and, as suspected, the pore sizes need to be revised smaller. Wafer # 1030 (40 s…