Permeance tests with new Omega rotameter
Yaron has acquired an Omega rotameter (FL-3803ST) with interchangeable flow tubes. The tubes operate in three different ranges low (6-61 mL/min, 042-15-N), medium (150-1,682 mL/min, 082-03-N), and High (1,000-23,752 mL/min, 034-39-N). I’ve attached an excel file with the calibration data plotted. We fit the curves with polynomial trendline to get equations. Also in the workbook below is a sheet where you input the reading and get the flow rate from each tube using the equations.
To measure the permeance, we used the following setup: Nitrogen tank->pressure regulator-> VWR digital manometer-> rotameter->sample->atmosphere. We measured some 5-slot NPN and pnc-Si samples for the NPN manuscript and here are the results:
30s etch 6.5% 22%porosity, 56nm pores- 61,000 ml/min/cm2/bar
40s etch 38% porosity, 78nm pores- 181,000 ml/min/cm2/bar
30nm pnc-si (wafer 1038) 9.5% porosity, 37nm pores- 30,000 ml/min/cm2/bar
40nm pnc-si 6.5% porosity, 40nm pores- 25,000 ml/min/cm2/bar