pnc-Si membrane from silicon nitride and silicon oxide system
Now we already confirmed that pores are able to form in both oxide/silicon/oxide and nitride/silicon/nitride system. Here comes an interesting question- how about nitride/silicon/oxide and oxide/silicon/nitride system? In the past week, another two different stacks including SiN(30nm)/ a-Si(25nm)/SiO2(30nm) and SiO2(30nm)/a-Si(25nm)/SiN(30nm) were tested. The nitride film was deposited with 25 W bias and the silicon with…