NSN SEPCONs
Still trying to reproduce Joe’s large pore material on SEPCONs using NSN stacks. This post has data from two wafers with 30/50/30 and 30/100/30 NSN. RTP is 1000C 50C/s for 1min. Nitride is etched off by placing samples in 50% HF for 3.5 minutes. (~30s after that the films start to lift off) I start…